Fabrication and characterization of subwavelength nanostructures on freestanding GaN slab
✍ Scribed by Wang, Yongjin; Hu, Fangren; Kanamori, Yoshiaki; Sameshima, Hidehisa; Hane, Kazuhiro
- Book ID
- 115412769
- Publisher
- Optical Society of America
- Year
- 2010
- Tongue
- English
- Weight
- 215 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1094-4087
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
## Abstract Sapphire substrates were nanopatterned by dry (inductively coupled plasma, ICP) etching to improve the performance of GaN‐based light‐emitting diodes (LEDs). GaN‐based LEDs on nanopatterned sapphire substrates (NPSS) were fabricated by metal organic chemical vapor deposition (MOCVD). Th
## Abstract __a__‐plane InN nanostructures were fabricated on a hole‐patterned __a__‐plane GaN template by electron‐cyclotron‐resonance plasma‐excited molecular beam epitaxy (ECR‐MBE). The growth temperature should be optimized to realize precise nucleation at the patterned holes with sufficient In