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Fabrication and characterization of shape anisotropy AlN/FeCoSiB magnetoelectric composite films

✍ Scribed by Chen, Shi; Yang, Xiaofei; Ouyang, Jun; Lin, Gengqi; Jin, Fang; Tong, Bei

Book ID
121890803
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
848 KB
Volume
40
Category
Article
ISSN
0272-8842

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## Abstract AlN films have been fabricated using a dc magnetron sputtering system under different N~2~ partial pressures, __P__~N~, without substrate heating. X‐ray diffraction revealed that the AlN(002) peak intensity increases first with increasing __P__~N~ (10–40%) and then drops when __P__~N~ i