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Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities

✍ Scribed by Deotare, Parag; Lončar, Marko; Khan, Mughees; Babinec, Thomas; McCutcheon, Murray W.

Book ID: 115434225
Publisher: Optical Society of America
Year: 2011
Tongue: English
Weight: 396 KB
Volume: 36
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.36.000421

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