✦ LIBER ✦
Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication
✍ Scribed by S. Duen~as; R. Pela´ez; E. Casta´n; R. Pinacho; L. Quintanilla; J. Barbolla; I. Ma´rtil; E. Redondo; G. Gonza´lez-Di´az
- Book ID
- 110270841
- Publisher
- Springer US
- Year
- 1999
- Tongue
- English
- Weight
- 122 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0957-4522
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