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Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications

โœ Scribed by S. Zimmermann; Q.T. Zhao; B. Trui; M. Wiemer; C. Kaufmann; S. Mantl; V. Dudek; T. Gessner


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
561 KB
Volume
82
Category
Article
ISSN
0167-9317

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