Fabrication and characterization of gold plated edges on thin substrates for measurement of e-beam diameter

✍ Scribed by M. Gentili; L. Grella; L. Luciani; M. Baciocchi; E. Di Fabrizio; B.A. Wallman

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 573 KB
• Volume: 14
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(91)90004-w