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Fabrication and characterization of a thin film capacitor using Al anodizing and Ni electroless plating

✍ Scribed by Joo-Hee Jang; Woo-Sung Choi; Chang-Hyoung Lee; Geun-Hee Jeong; Nam-Jeong Kim; Chang-Lim Yu; Chan Park; Su-Jeong Suh


Book ID
113898447
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
372 KB
Volume
63
Category
Article
ISSN
1359-6462

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In order to obtain thin-film capacitors with high heat resistance and high reliability, we have investigated the preparation conditions of stoichiometric Al 3 Hf intermetallic compound film and the capacitor properties and leakage current of Al 3 Hf anodized capacitors. The effect of reduction of ox