Fabrication and Characterization of GaAs MOS Capacitor With CVD Grown Polymer-Based Thin Film as a Gate Dielectric

✍ Scribed by Oulachgar, E.H.; Aktik, C.; Scarlete, M.

• Book ID: 114620062
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 438 KB
• Volume: 57
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2010.2051488