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Fabrication and characterization of a micromachined passive valve

โœ Scribed by Bien, D C S; Mitchell, S J N; Gamble, H S

Book ID
127084107
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
214 KB
Volume
13
Category
Article
ISSN
0960-1317

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On-chip micro-transformer with square interwinding coil has been developed. The transformer consists of stacked spiral coil which is fabricated on high resistive glass substrate using MEMS technology. The device is fabricated using simple surface micromachining process including an additional bondin