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Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers

✍ Scribed by Xuecheng Jin, ; Ladabaum, I.; Degertekin, F.L.; Calmes, S.; Khuri-Yakub, B.T.

Book ID: 124089420
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 592 KB
Volume: 8
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.749409

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