Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

✍ Scribed by Qifa Zhou; J. Cannata; R. Meyer; D. Van Tol; S. Tadigadapa; W. Hughes; K. Shung; S. Trolier-mckinstry

• Book ID: 126742663
• Publisher: IEEE
• Year: 2005
• Tongue: English
• Weight: 896 KB
• Volume: 52
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/TUFFC.2005.1417256