𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Fabrication and characterisation of CMOS compatible silicon nanowire biosensor

✍ Scribed by Kang, G.B.; Park, J.M.; Kim, S.G.; Koo, J.G.; Park, J.H.; Sohn, Y.-S.; Kim, Y.T.

Book ID
121868450
Publisher
The Institution of Electrical Engineers
Year
2008
Tongue
English
Weight
223 KB
Volume
44
Category
Article
ISSN
0013-5194

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabrication and application of a microfl
Fabrication and application of a microfluidic-embedded silicon nanowire biosensor chip
✍ Xuan Thang Vu; Regina Stockmann; Bernhard Wolfrum; Andreas OffenhΓ€usser; Sven In πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 743 KB

## Abstract We report the fabrication of a silicon nanowire (SiNW) transistor array realized in a top‐down process on 4β€²β€² silicon‐on‐insulator (SOI) wafers. This process is a second, optimized version combining thermal nanoimprint lithography and wet chemical etching to define planar nanowires and