Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding

✍ Scribed by Niklaus, F.; Haasl, S.; Stemme, G.

• Book ID: 121491197
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 732 KB
• Volume: 12
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2003.815833