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CMOS-compatible fabrication of top-gated field-effect transistor silicon nanowire-based biosensors

✍ Scribed by Ginet, Patrick; Akiyama, Sho; Takama, Nobuyuki; Fujita, Hiroyuki; Kim, Beomjoon

Book ID: 125490880
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 909 KB
Volume: 21
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/21/6/065008

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