Fabricating single silicon quantum rods for repeatable single dot photoluminescence measurements

✍ Scribed by Bruhn, Benjamin ;Sangghaleh, Fatemeh ;Linnros, Jan

• Book ID: 105366004
• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 350 KB
• Volume: 208
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.201000556

✦ Synopsis

Abstract

A fabrication method for a matrix pattern of laterally separated silicon quantum rods was developed, consisting of a three‐step recipe utilizing electron beam lithography (EBL), reactive ion etching (RIE), and oxidation. Photoluminescence (PL) measurements – images, spectra, and blinking – verified that the presented method results in a high number of luminescing single silicon quantum rods in well defined positions on the sample. These are suitable for single dot spectroscopy and repeatable measurements, even using different measurement methods and instruments.

magnified image

Colorized scanning electron microscope images of undulating silicon nanowalls for controlled single quantum rod fabrication.