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Extreme UV diffraction grating fabricated by nanoimprint lithography

✍ Scribed by Lin, Chun-Hung; Lin, Yi-Ming; Liang, Chia-Ching; Lee, Yin-Yu; Fung, Hok-Sum; Shew, Bor-Yuan; Chen, Szu-Hung

No coin nor oath required. For personal study only.

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