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Extreme ultraviolet lithography

✍ Scribed by Stulen, R.H.; Sweeney, D.W.

Book ID
117869228
Publisher
IEEE
Year
1999
Tongue
English
Weight
300 KB
Volume
35
Category
Article
ISSN
0018-9197

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πŸ“œ SIMILAR VOLUMES

Flare mitigation strategies in extreme u
Flare mitigation strategies in extreme ultraviolet lithography
✍ Insung Kim; Alan Myers; Lawrence S. Melvin III; Brian Ward; Gian Francesco Lorus πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 911 KB

This study investigates various approaches to flare mitigation in EUVL. We evaluate the effectiveness of rule-based correction by defining a design where the critical dimension uniformity is used as a measure of the quality of the correction. We also describe the outcome of a model-based correction