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Extraction of second order piezoelectric parameters in bulk acoustic wave resonators

✍ Scribed by van Hemert, Tom; Reimann, Klaus; Hueting, Raymond J. E.

Book ID
126609162
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
635 KB
Volume
100
Category
Article
ISSN
0003-6951

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp