Exploration of the ultimate patterning potential achievable with focused ion beams

✍ Scribed by J. Gierak; E. Bourhis; M.N. Mérat Combes; Y. Chriqui; I. Sagnes; D. Mailly; P. Hawkes; R. Jede; L. Bruchhaus; L. Bardotti; B. Prével; A. Hannour; P. Mélinon; A. Perez; J. Ferré; J.-P. Jamet; A. Mougin; C. Chappert; V. Mathet

• Book ID: 108207404
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 532 KB
• Volume: 78-79
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.038