Silicon wafers are the most widely used substrates for semiconductors. The falling price of silicon wafers has created tremendous pressure to develop cost-effective processes to manufacture silicon wafers. Fine grinding possesses great potential to reduce the overall cost for manufacturing silicon w
โฆ LIBER โฆ
Experiments on gas cooling of wafers
โ Scribed by Monty King; Peter H. Rose
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 315 KB
- Volume
- 189
- Category
- Article
- ISSN
- 0167-5087
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Fine grinding of silicon wafers: designe
โ
Z.J Pei; Alan Strasbaugh
๐
Article
๐
2002
๐
Elsevier Science
๐
English
โ 445 KB
Further experiments on adiabatic cooling
โ
W.J. De Haas; E.C. Wiersma
๐
Article
๐
1935
๐
Elsevier Science
โ 264 KB
s t h e l o w e s t t e m p e r a t u r e r e a c h e d , as g
Theoretical predictions of recent experi
โ
D.P. Hodgkinson; A.J. Taylor
๐
Article
๐
1984
๐
Elsevier Science
๐
English
โ 424 KB
An experiment on adiabatic cooling of ma
โ
W.J. de Haas; E.C. Wiersma
๐
Article
๐
1934
๐
Elsevier Science
โ 109 KB
Scaleup experiments on seeded batch cool
โ
Norihito Doki; Noriaki Kubota; Akira Sato; Masaaki Yokota; Osamu Hamada; Fumio M
๐
Article
๐
1999
๐
American Institute of Chemical Engineers
๐
English
โ 174 KB
Experiments on adiabatic cooling of para
โ
W.J De Haas; E.C Wiersma; H.A Kramers
๐
Article
๐
1934
๐
Elsevier Science
โ 540 KB
A description of the apparatus used for obtaining very low temperatures by the method of adiabatic demagnetisation is given. The method is discussed. Measurements have been carried out on Cerous fluoride, Dysprosium ethylsulfate and Cerium-ethylsulfate. The latter salt gave the lowest temperature of