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Experimental studies of ionization processes in sputtering of GaAs

✍ Scribed by Z. Šroubek; H. Oechsner

Book ID: 116067660
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 760 KB
Volume: 348
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(95)00995-7

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