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The theoretical and experimental study of the ionization processes during the low energy ion sputtering

✍ Scribed by Z. Šroubek

Book ID: 118980858
Publisher: Elsevier Science
Year: 1974
Tongue: English
Weight: 882 KB
Volume: 44
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(74)90092-2

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