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Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition

✍ Scribed by Horkel, M; Van Aeken, K; Eisenmenger-Sittner, C; Depla, D; Mahieu, S; Leroy, W P

Book ID: 120494281
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 539 KB
Volume: 43
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/43/7/075302

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