Magnetron sputtering modes during pulsed deposition process determined by the analysis of power supply parameter

✍ Scribed by K. Krówka; A. Wiatrowski; W.M. Posadowski

• Book ID: 113936978
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 546 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.04.068