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Experimental and Theoretical Studies of a Pulsed Microwave Excited Ar/CF4Plasma

✍ Scribed by M. Baeva; X. Luo; J. H. Schäfer; J. Uhlenbusch; Z. Zhang

Book ID: 110411438
Publisher: Springer
Year: 1998
Tongue: English
Weight: 982 KB
Volume: 18
Category: Article
ISSN: 0272-4324
DOI: 10.1023/a:1021803114922

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