Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in $hbox{Ar/CF}_{4}$ and $hbox{Ar/CHF}_{3}$ Mixtures

✍ Scribed by Voloshin, D.G.; Rakhimova, T.V.; Braginsky, O.V.; Klopovskiy, K.S.; Kovalev, A.S.; Lopaev, D.V.; Proshina, O.V.; Rakhimov, A.T.; Shamiryan, D.; Vasilieva, A.N.

• Book ID: 111657897
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 610 KB
• Volume: 37
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/tps.2009.2023849