✦ LIBER ✦

Experience with deep UV excimer laser lithography

✍ Scribed by F Goodall; R A Lawes

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ultrafast deep UV Lithography with excim

✍ Jain, K.; Willson, C.G.; Lin, B.J. 📂 Article 📅 1982 🏛 IEEE 🌐 English ⚖ 496 KB

Ultrafast deep UV lithography using exci

✍ K. Jain; S. Rice; B. J. Lin 📂 Article 📅 1983 🏛 Society for Plastic Engineers 🌐 English ⚖ 264 KB

Novel positive deep UV resist for KrF ex

✍ Masayuki Endo; Yoshiyuki Tani; Masaru Sasago; Kazufumi Ogawa; Noboru Nomura 📂 Article 📅 1989 🏛 Society for Plastic Engineers 🌐 English ⚖ 347 KB

Excimer lasers as deep UV sources for ph

✍ F Goodall; RA Lawes; PH Sharp 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 1023 KB

Ultrafast High-Resolution Contact Lithog

✍ Jain, K.; Willson, C. G.; Lin, B. J. 📂 Article 📅 1982 🏛 IBM 🌐 English ⚖ 736 KB

SPIE Proceedings [SPIE Boston - DL tenta

✍ Elliott, David J.; Sengupta, Uday K.; Piwczyk, Bernhard P. 📂 Article 📅 1991 🏛 SPIE ⚖ 512 KB