✦ LIBER ✦

Excimer‐laser annealing for low‐temperature poly‐Si TFTs

✍ Scribed by Kim, Hyun Jae

Book ID: 126943805
Publisher: Informa UK (Taylor & Francis)
Year: 2003
Tongue: English
Weight: 311 KB
Volume: 4
Category: Article
ISSN: 1598-0316
DOI: 10.1080/15980316.2003.9651927

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low temperature poly-Si TFTs for display

Low temperature poly-Si TFTs for display application

✍ In-Hyuk Song; Min-Koo Han 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 240 KB

We have fabricated new polycrystalline silicon (poly-Si) thin film transistors (TFTs) with a single grain-boundary by a simple excimer laser annealing (ELA) method which employs a selectively floating amorphous silicon (a-Si) active layer and Al patterns. A thermally insulating air-gap between the f

Low-temperature preparation of poly-si t

Low-temperature preparation of poly-si tft by ar laser annealing at high scanning speed

✍ Kunio Masumo; Masanori Yuki 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 355 KB

Fabrication of poly-si tfts using laser

Fabrication of poly-si tfts using laser annealing technique

✍ Toshiyuki Sameshima 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 639 KB

A new method to enhance mobility of poly

A new method to enhance mobility of poly-Si TFT recrystallized by excimer laser annealing

✍ Kuriyama, H.; Kiyama, S.; Kuwahara, T.; Noguchi, S.; Nakano, S. 📂 Article 📅 1991 🏛 IEEE 🌐 English ⚖ 136 KB

Excimer-laser crystallized poly-Si TFT's

Excimer-laser crystallized poly-Si TFT's with transparent gate

✍ Chang-Dong Kim; Matsumura, M. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 500 KB

Excimer-laser-annealed poly-Si thin-film

Excimer-laser-annealed poly-Si thin-film transistors

✍ Brotherton, S.D.; McCulloch, D.J.; Clegg, J.B.; Gowers, J.P. 📂 Article 📅 1993 🏛 IEEE 🌐 English ⚖ 726 KB