A new method to enhance mobility of poly-Si TFT recrystallized by excimer laser annealing

✍ Scribed by Kuriyama, H.; Kiyama, S.; Kuwahara, T.; Noguchi, S.; Nakano, S.

• Book ID: 114534758
• Publisher: IEEE
• Year: 1991
• Tongue: English
• Weight: 136 KB
• Volume: 38
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.158706