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Excimer laser micromachining for rapid fabrication of diffractive optical elements

✍ Scribed by Behrmann, Gregory P. ;Duignan, Michael T.


Book ID
115346153
Publisher
The Optical Society
Year
1997
Tongue
English
Weight
740 KB
Volume
36
Category
Article
ISSN
1559-128X

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Abstnet-A method is presented for the fabrication of carbon ink microelectrodes in a composite membrane or thin laminate arrangement . The scheme utilises uv excimer laser photoablation of nanosecond pulse duration at wavelength 248 am to generate the required micro-hole structure in 12pm PET film .