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Excimer laser-induced etching of non-hydrogenated (a-C) and hydrogenated (a-C:H) diamond-like carbon films: a comparative study

✍ Scribed by A.P. Malshe; S.B. Ogale; S.T. Kshirsagar; K.S. Chari


Book ID
119124553
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
600 KB
Volume
11
Category
Article
ISSN
0167-577X

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