✦ LIBER ✦
Ion bombardment effects in plasma deposition of hydrogenated amorphous silicon carbide films: A comparative study of d.c. and r.f. discharges
✍ Scribed by Y. Catherine; A. Zamouche; J. Bullot; M. Gauthier
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 924 KB
- Volume
- 109
- Category
- Article
- ISSN
- 0040-6090
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