Control of the thickness distribution of
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R. Schmidt; M. Parlak; A.W. Brinkman
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Article
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2008
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Elsevier Science
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English
β 557 KB
In this work the thickness distribution of NTC thermistor thin films produced by low deposition rate (0.8 nm s -1 ) electron-beam evaporation is investigated. The target preparation, deposition conditions and geometrical set-up of the evaporation mechanism are described in detail. The evaporation ge