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Evaporation of thin films of uniform and controlled thickness. Their application to electronics


Publisher
Elsevier Science
Year
1951
Tongue
English
Weight
111 KB
Volume
1
Category
Article
ISSN
0042-207X

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Control of the thickness distribution of
✍ R. Schmidt; M. Parlak; A.W. Brinkman πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 557 KB

In this work the thickness distribution of NTC thermistor thin films produced by low deposition rate (0.8 nm s -1 ) electron-beam evaporation is investigated. The target preparation, deposition conditions and geometrical set-up of the evaporation mechanism are described in detail. The evaporation ge