The dynamic vacuum wasca. torr during film formation and the molecular precursors were heated to a temperature defined as (80"-120 "C) so that sublimation/distillation into the heated chamber occurred at a rate of ca. 0.1 g/ h. The temperature gradient within the heated furnace was determined to be
Evaluation of Thin Film Titanium Nitride Electrodes for Electroanalytical Applications
✍ Scribed by Carolina Nunes Kirchner; Karl Heinz Hallmeier; Rüdiger Szargan; Thomas Raschke; Christian Radehaus; Gunther Wittstock
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 242 KB
- Volume
- 19
- Category
- Article
- ISSN
- 1040-0397
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