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Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

✍ Scribed by C. L. Cha; E. F. Chor; Y. M. Jia; A. J. Bourdillon; H. Gong; J. S. Pan; A. Q. Zhang; S. K. Tang; C. B. Boothroyd

Book ID
110239560
Publisher
Springer
Year
1999
Tongue
English
Weight
267 KB
Volume
18
Category
Article
ISSN
0261-8028

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