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Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy

✍ Scribed by A. Förster; J.M. Layet; H. Lüth

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 484 KB
Volume: 41-42
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90076-7

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