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Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures

✍ Scribed by B.R. Chakraborty; S.K. Halder; K.K. Maurya; A.K. Srivastava; V.K. Toutam; M.K. Dalai; G. Sehgal; S. Singh

Book ID
116943614
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
810 KB
Volume
520
Category
Article
ISSN
0040-6090

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