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Electrical and structural properties of Ta–N thin film and Ta/Ta–N multilayer for embedded resistor

✍ Scribed by Suok-Min Na; In-Soo Park; Se-Young Park; Geun-Hee Jeong; Su-Jeong Suh


Book ID
108289845
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
569 KB
Volume
516
Category
Article
ISSN
0040-6090

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