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Structure, electrophysical, and mechanical properties of Ta-B-N films

✍ Scribed by A. A. Goncharov; V. V. Petukhov; S. N. Dub; V. A. Konovalov


Book ID
110177659
Publisher
SP MAIK Nauka/Interperiodica
Year
2008
Tongue
English
Weight
188 KB
Volume
105
Category
Article
ISSN
0031-918X

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