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Etching materials with an atmospheric-pressure plasma jet

โœ Scribed by Jeong, J Y; Babayan, S E; Tu, V J; Park, J; Henins, I; Hicks, R F; Selwyn, G S


Book ID
121084679
Publisher
Institute of Physics
Year
1998
Tongue
English
Weight
120 KB
Volume
7
Category
Article
ISSN
0963-0252

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