Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

✍ Scribed by Haijiang, Li; Shouguo, Wang; Lingli, Zhao; Tianchun, Ye

• Book ID: 120889259
• Publisher: IOP Publishing
• Year: 2004
• Tongue: English
• Weight: 437 KB
• Volume: 6
• Category: Article
• ISSN: 1009-0630
• DOI: 10.1088/1009-0630/6/5/010