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Deposition of silicon dioxide films with an atmospheric-pressure plasma jet

✍ Scribed by Babayan, S E; Jeong, J Y; Tu, V J; Park, J; Selwyn, G S; Hicks, R F


Book ID
121510107
Publisher
Institute of Physics
Year
1998
Tongue
English
Weight
98 KB
Volume
7
Category
Article
ISSN
0963-0252

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