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A Nonequilibrium, Atmospheric-Pressure Argon Plasma Torch for Deposition of Thin Silicon Dioxide Films

✍ Scribed by T. P. Kasih; S. Kuroda; H. Kubota

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 469 KB
Volume: 13
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200606535

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