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Estimation of bending of micromachined gold cantilever due to residual stress

✍ Scribed by Dutta, Shankar; Imran, Md.; Pandey, Akhilesh; Saha, Tulana; Yadav, Isha; Pal, Ramjay; Jain, K. K.; Chatterjee, Ratnamala


Book ID
121580435
Publisher
Springer US
Year
2013
Tongue
English
Weight
733 KB
Volume
25
Category
Article
ISSN
0957-4522

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