Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever

✍ Scribed by Kuo, Ju-Nan; Lee, Gwo-Bin; Pan, Wen-Fung; Lee, Huei-Huang

• Book ID: 121851262
• Publisher: Institute of Pure and Applied Physics
• Year: 2005
• Tongue: English
• Weight: 386 KB
• Volume: 44
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.44.3180