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ESDIAD studies of fluorine and chlorine adsorption at Si(100)

✍ Scribed by S.L. Bennett; C.L. Greenwood; E.M. Williams

Publisher: Elsevier Science
Year: 1993
Weight: 69 KB
Volume: 290
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(93)90936-d

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