Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

✍ Scribed by Lafleur, T; Chabert, P; Turner, M M; Booth, J P

• Book ID: 121863340
• Publisher: Institute of Physics
• Year: 2014
• Tongue: English
• Weight: 407 KB
• Volume: 23
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/23/1/015016