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Epitaxial YBa2Cu3O7 and GdBa2Cu3O7 thin films grown in-situ by single target d.c. sputtering

โœ Scribed by M.G. Karkut; M. Guilloux-Viry; A. Perrin; O. Pena; J. Padiou; M. Sergent


Book ID
116017784
Publisher
Elsevier Science
Year
1990
Weight
472 KB
Volume
164-165
Category
Article
ISSN
0022-5088

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In situ thin films of YBa2Cu3O7 prepared
โœ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; ร˜. Fischer ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible