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Epitaxial lateral overgrowth of amorphous CVD silicon films induced by ion irradiation

✍ Scribed by M. Voelskow; W. Skorupa; K. Wollschlaeger; J. Matthael; P. Knothe; K.-H. Heinig; H. Bartsch

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 346 KB
Volume: 43
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90211-0

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