Epitaxial Growth of Rhombohedral Boron P
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Y. Kumashiro; H. Yoshizawa; T. Yokoyama
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Article
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1997
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Elsevier Science
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English
β 683 KB
Rhombohedral boron phosphide (B 12 P 2 ) single crystalline films were grown at 1100Β°C by thermal decomposition of a B 2 H 6 -PH 3 -H 2 gas mixture. The crystal quality and orientation of the films, determined by reflection high-energy electron diffraction and X-ray diffraction, are strongly influen